Epitaxy and semiconductor technology

Recent publications from Nanotechnology group

A. Lankinen, T. O. Tuomi, P. Kostamo, H. Jussila, S. Sintonen, H. Lipsanen, M. Tilli, J. Mäkinen, A. N. Danilewsky 2016

Synchrotron X-ray diffraction topography study of bonding-induced strain in silicon-on-insulator wafers

Thin Solid Films 603, 435-440 (2016).

 

M.G. Mynbaeva, A.V. Kremleva, D.A. Kirilenko, A.A. Sitnikova, A.I. Pechnikov, K.D. Mynbaev, V.I. Nikolaev, V.E. Bougrov, H. Lipsanen, A.E. Romanov 2016

TEM study of defect structure of GaN epitaxial films grown on GaN/Al2O3 substrates with buried column pattern

Journal of Crystal Growth 445, 30–36 (2016)

 

Rudinsky, M.E.; Karpov, S.Yu.; Lipsanen, Harri; Romanov, A.E. 2015

Critical thickness and bow of pseudomorphic InxGa1-xAs-based laser heterostructures grown on (001)GaAs and (001)InP substrates

Materials Physics and Mechanics 24 (3): 278-283

 

Tilli, Juha-Matti; Jussila, Henri; Yu, Kin Man; Huhtio, Teppo; Sopanen, Markku 2014

Composition determination of quaternary GaAsPN layers from single X-ray diffraction measurement of quasi-forbidden (002) reflection

Journal of Applied Physics 115 (20): 203102

 

Subramaniyam, Nagarajan; Svensk, Olli; Lehtola, Lauri; Lipsanen, Harri; Sopanen, Markku 2014

Stress distribution in GaN nanopillars using confocal Raman mapping technique

Applied Physics Letters 104 (151906): 5

 

Sintonen, Sakari; Rudziński, Mariusz; Suihkonen, Sami; Jussila, Henri; Knetzger, Michael; Meissner, Elke; Danilewsky, Andreas; Tuomi, Turkka O.; Lipsanen, Harri 2014

Synchrotron radiation x-ray topography and defect selective etching analysis of threading dislocations in GaN.

Journal of Applied Physics 116 (8): 083504

 

Sintonen, Sakari; Suihkonen, Sami; Jussila, Henri; Lipsanen, Harri; Tuomi, Turkka O.; Letts, Edward; Hoff, Sierra; Hashimoto, Tadao 2014

Defect structure of a free standing GaN wafer grown by the ammonothermal method

Journal of Crystal Growth 406 (1): 72-77

 

Sintonen, Sakari; Suihkonen, Sami; Jussila, Henri; Danilewsky, Andreas; Stankiewicz, Romuald; Tuomi, Turkka O.; Lipsanen, Harri 2014

Large-area analysis of dislocations in ammonothermal GaN by synchrotron radiation X-ray topography

Applied Physics Express 7 (9): 091003

 

Jussila, H.; Yu, K.M.; Kujala, J.; Tuomisto, F.; Nagarajan, S.; Lemettinen, J.; Huhtio, T.; Tuomi, T.O.; Lipsanen, H.; Sopanen, M. 2014

Substitutionality of nitrogen atoms and formation of nitrogen complexes and point defects in GaPN alloys

Journal of Physics D: Applied Physics 47 (47): 075106

 

Olsson, Anders; Aierken, Abuduwayiti; Jussila, Henri; Bauer, Jan; Oksanen, Jani; Breitenstein, Otwin; Lipsanen, Harri; Tulkki, Jukka 2014

Yield and leakage currents of large area lattice matched InP/InGaAs heterostructures

Journal of Applied Physics (8): 083105

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