Research facilities
Device Processing & Thin Film Deposition
- Clean Room processing: See Nanofab facilities
- Texturing/nanostructures: RIE, FIB, wet etching
- Doping: Spin-on glass (B,P), P diffusion POCl3, Ion implantation (B, P)
- Patterning: Optical litography, E-beam
- Thin films: ALD, LPCVD, PECVD, Thermal Oxidation, Sputtering, Evaporation
Characterization
- Microwave photoconductance decay (u-PCD)
- Surface photovoltage (SPV)
- Deep level transient spectroscopy (DLTS)
- Quasi-steady-state photoconductance (QSSPC) - in cleanroom
- Temperature dependent lifetime measurement
- Multipurpose solar cell characterization (PV-2000) - in cleanroom
- Light beam induced current (LBIC)
- Probe station (IV, CV low-freq./high-freq.)
- Post-diffusion process tool (Suns-Voc)
- Solar simulator (QuickSun)
- Ellipsometer, profilometer, 4-point probe - in cleanroom
- SEM, AFM, EDX
- Characterization tools at Nanofab
Modeling
- Silvaco Atlas software
- Matlab-based diffusion and nucleation simulator